| Installation |
Vertical ~ Horizontal, VG25 vacuum flange (Customer preparation) |
| Calibration gas inlet |
SUS TP O.D.1/4 (O-ring fitting) |
| Measuring range |
1ppm ~ 100%O2 1 ~ 1x10-30atm O2 |
| Linearity |
Large one either of less than ±1%FS or±1ppm |
| Repeatability |
Large one either of less than ±1%FS or±1ppm |
| Response |
90% reading 10sec. (Swinging to a high density side) |
| Drift |
Less than ±2%FS/week |
| Sampling |
Diffusion |
| Sample pressure |
2atm~1x10-3Pa(1 x 10-5Torr) |
| Sample Temp. |
300°C MAX |
| Warm up time |
About 20 minutes |
| Option |
Kind and size of flange, Standard gas line stop valve. |